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Handbook of Silicon Wafer Cleaning Technology, 2nd Edition, Second Edition

From William Andrew




[PDF.it83] Handbook of Silicon Wafer Cleaning Technology, 2nd Edition, Second Edition

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 | #6581235 in Books |  2008-01-24 |  2004-01-09 | Original language:English | PDF # 1 |  9.00 x1.69 x6.00l, | File type: PDF | 660 pages

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The second Edition of the Handbook of Silicon Wafer Cleaning Technology is intended to provide knowledge of wet, plasma, and other surface conditioning techniques used to manufacture integrated circuits. The integration of the clean processes into the device manufacturing flow will be presented with respect to other manufacturing steps such as thermal, implant, etching, and photolithography processes. The Handbook discusses both wet and plasma-based cleaning technologies...

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